Advancements in Deep Ultraviolet Laser Technology

Researchers developed a 60-milliwatt solid-state DUV laser at 193 nm using LBO crystals, setting new benchmarks in efficiency values.

The generated DUV laser, accompanied by its 221-nm counterpart, exhibits an average power of 60 mW, a pulse duration of 4.6 nanoseconds , and a repetition rate of 6 kilohertz , with a linewidth of approximately 640 megahertz . Notably, this marks the highest power output for both 193- and 221-nm lasers generated by an LBO crystal, along with the narrowest linewidth reported for a 193-nm laser.

According to Prof. Hongwen Xuan, corresponding author for the work, the reported research demonstrates “the viability of pumping LBO with solid-state lasers for reliable and effective generation of narrow-linewidth laser at 193 nm, and opens a new way to fabricate a cost-effective, high-power DUV laser system using LBO.”

Source: Tech Daily Report (techdailyreport.net)

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